<hardware> (MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer.
Applications include sensors, medical devices, process controls.
See also nanotechnology.
Last updated: 1999-03-25
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Nearby terms: microcomputer « microcontroller « MicroDroid « microelectromechanical system » Microelectronics and Computer Technology Corporation » MicroEmacs » microfloppies