microelectromechanical system


(MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer.

Applications include sensors, medical devices, process controls.

See also nanotechnology.

Last updated: 1999-03-25

Nearby terms:

microelectromechanical systemMicroelectronics and Computer Technology Corporation

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