<hardware> (MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer.
Applications include sensors, medical devices, process controls.
See also nanotechnology.
Try this search on Wikipedia, OneLook, Google
Nearby terms: microcomputer « microcontroller « MicroDroid « microelectromechanical system » Microelectronics and Computer Technology Corporation » MicroEmacs » microfloppies